场发射灯丝
YPS热场发射(FE)电镜灯丝可以用在多种聚焦电子束系统上,如SEM,TEM,Auger和CD-SEM等;其优异稳定的质量可以和FEI及Denka媲美,且互换;适用于多种电镜如 Hitachi, JEOL, ZEISS, FEI , PHI , Tescan 等。
YPS场发射(FE)电镜灯丝主要有2种型式:
1、YPS-174
YPS174是较普通的标准热场发射灯丝,与FEI和Denka有相同的品质。光圈直径400um,针尖**250um。
2、YPS-184
主要用于FEI SEM电镜,也可用于Tescan FESEMs。
YPS174 YPS184典型灯丝性能参数:
Emitter Type | Thermionic | Thermionic | Schottky FE | cold FE |
Cathode material | W | LaB6 | ZrO/W (100) | W(310) |
Operating temperature [K] | 2,800 | 1,900 | 1,800 | 300 |
Cathode radius [nm] | 60,000 | 10,000 | < 1,000 | < 100 |
Effective source radius [nm] | 15,000 | 5,000 | 15 (*) | 2.5(*) |
Emission current density [A/cm2] | 3 | 30 | 5,300 | 17,000 |
Total emission current [μA] | 200 | 80 | 200 | 5 |
Normalized brightness [A/cm2.sr.kV] | 1 x 104 | 1 x 105 | 1 x 107 | 2 x 107 |
Maximum probe current [nA] | 1000 | 1000 | 10-100 | 0.2 |
Energy spread @ cathode [eV] | 0.59 | 0.40 | 0.31 | 0.26 |
Energy spread @ gun exit [eV] | 1.5-2.5 | 1.3-2.5 | 0.35-0.7 | 0.3-0.7 |
Beam noise [%] | 1 | 1 | 1 | 5-10 |
Emission current drift [%/h] | 0.1 | 0.2 | < 0.5 | 5 |
Operating vacuum hPa/mbar1 | <1 x 10-5 | <1 x 10-6 | <1 x 10-9 | <1x 10-10 |
Typical Cathode life [h] | 100 | >1000 | >5000 | >2000 |
Cathode regeneration | not required | not required | not required | every 6 to 8 hours |
Sensitivity to external influence | minimal | minimal | low | high |
* virtual source; 1hPa= hectopascals = 100 Pa
订购信息:
货号 | 产品名称 | 规格 |
YPS174 | YPS热场发射(FE)电镜灯丝 | 个 |
YPS184 | YPS热场发射(FE)电镜灯丝 | 个 |